ULVAC CRYOGENICS KOREA

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Category	Liquefied nitrogen generating capacity 60Hz(50Hz)	Ln₂ storage capacity	Processing capacity	Size	Weight	Power			Coolant
Category	Liquefied nitrogen generating capacity 60Hz(50Hz)	Ln₂ storage capacity	Processing capacity	Size	Weight	Power	KW	Breaker mass	Inlet temperature	Flow rate	Pressure	Water quality
Unit	L/day	L	m3	WDH(mm)	Kg	-	KW	A	℃	L/min	Mpa	-
EMP-07A	8(6)	40	5.2	607501,628	220	AC100V single phase	1.4(1.2)	20	air-cooled system	air-cooled system	air-cooled system	air-cooled system
EMP-07W	8(6)	40	5.2	6007501,628	230	AC100V single phase	1.4(1.2)	20	5~35	2~5	0.8Mpa below	purified water
EMP-14A	14(14)	40	9.1	6007501,688	235	AC200V 3	2.0(1.7)	20	air-cooled system	air-cooled system	air-cooled system	air-cooled system
EMP-14W	14(14)	40	9.1	6007501,688	230	AC200V 3	1.9(1.6)	20	10~30	3~6	0.8Mpa below	purified water
EMP-20W	20(20)	80	13	9307401,661	340	AC200V 3 single phase	4.1(3.3)	30	10~30	3~6	0.8 below	purified water