- CRYO PUMP CRYO PUMP
- SUPER TRAP SUPER TRAP
- REFRIGERATOR REFRIGERATOR
- LN2GENERATOR LN2 GENERATOR
- MAINTENANCE MAINTENANCE
- SUPPORT SUPPORT
- COMPANY COMPANY
- CAREERS CAREERS
Product Features
Optimized for SPUTTER equipment
Argon capacity is 2.5 times the existing model (U8H).
Argon throughout is 2.5 times the existing standard model
Hydrogen purge is 1.2 times greater
Increased regeneration cycle raises the availability of equipment
Multi-drive up to 3 units
