- CRYO PUMP CRYO PUMP
- SUPER TRAP SUPER TRAP
- REFRIGERATOR REFRIGERATOR
- LN2GENERATOR LN2 GENERATOR
- MAINTENANCE MAINTENANCE
- SUPPORT SUPPORT
- COMPANY COMPANY
- CAREERS CAREERS
The CRYO PUMP removes all gases simultaneously regardless of whether their molecules are heavier or lighter than TMP.
In addition, the activation module within the pump is not exposed, making it interruption-free and safe against the infiltration of foreign matters.
H2O molecules make up most of the particles in the chamber.
The CRYO PUMP has a superior capability to remove all gas molecules by means of adsorption and condensation on the cryogenic surface.
Different gas molecules have their own designated pumpingl section, enabling the same performance as the pumpingl capability on the SPEC to be maintained.
Refer to the following table and graph for more details on the performance of CRYO PUMP and TURBO MOLECULAR PUMP.
| Category | CRYO PUMP | TURBO MOLECULAR PUMP |
|---|---|---|
| pumping speed N2 (L/s) | 1.3~1.7times | 1 (benchmark) |
| pumping speed H2 (L/s) | 2.7~4.7times | 1 (benchmark) |
| pumping speed H2O (L/s) | 3.5~4.6times | 1 (benchmark) |
| pumping performance of equivalent size | 3times (average) | 1 (benchmark) |
| Power consumption of equivalent performance | 1 (benchmark) | 2~5times |
| Chamber installation direction | 360° | Vertical(90°), horizontal(180°) |
| Maintenance | Convenient | Complicated |
