VS-OIL-DIFFUSION FEATURE

라인업

STANDARD

비교
구분 배기속도(20℃) (L/s) 도달압력 최대 유량 Pa·L/s(Torr·L/s) 배기용량 Pa·L(Torr·L) 냉각강하시간 min(Hz) 배기구 FLANGE Compress or unit 중량
N2 H2 Ar H2O Ar H2 Ar H2
CRYO-U4H 450 500 370 1100 10^-7(10^-9) 1.3*10×3(9.8) 1.3*10×3(9.8) 1.0×10^7(7.5×10^4) 1.5×10^5(11.3) 45/50 14.5
CRYO-U6H 750 1,100 620 2,100 10^-7(10^-9) 1.1×10^3(7.9) 1.1×10^2(0.8) 5.6×10^7(4.2×10^5) 3.1×10^5(2.3×10^3) 80/70(50/60) UVG-150, UFC-203 C10, C10AT, C10ES 19
CRYO-U8H 1,700 2,700 1,400 4,000 10^-7(10^-9) 1.2×10^3(8.9) 2.4×10^2(1.8) 1.0×10^8(7.6×10^5) 1.0×10^6(7.6×10^3) 100/90(50/60) UVG-200, UFC-25, 6"ANSI C10, C10AT, C10ES 20.8
CRYO-U8H-U 1,700 2,700 1,400 4,000 10^-7(10^-9) 1.2×10^3(8.9) 2.4×10^2(1.8) 1.0×10^8(7.6×10^5) 1.0×10^6(7.6×10^3) 100/90(50/60) UVG-200, UFC-253, 6"ANSI C10, C10AT, C10ES 20.8
CRYO-U8HL 1,500 2,200 1,200 4,000 10^-7(10^-9) 1.2×10^3(8.9) 1.6×10^2(1.2) 1.6×10^8(1.2×10^6) 1.2×10^6(9.0×10^3) 100/90(50/60) UVG-200 C10, C10AT, C10ES 20
CRYO-U8HSP 1,700 3,200 1,400 4,000 10^-7(10^-9) 1.2×10^3(8.9) 2.4×10^2(1.8) 2.5×10^8(1.9×10^6) 1.0×10^6(7.8×10^3) 110/100(50/60) UVG-200, UFC-253, 6"ANSI C10,C10ES 33.2
CRYO-U10H 2,400 3,600 200 6,900 10^-7(10^-9) 8.0×10^2(6.0) 1.5×10^2(1.1) 1.0×10^8(7.8×10^5) 6.7×10^5(5.0×10^3) 110/100(50/60) UVG-250 C15R 29
CRYO-U10HSP 2,400 3,600 2,000 6,900 10^-7(10^-9) 1.30×10^3(9.8) 2.1×10^2(1.6) 2.0×10^8(1.5×10^6) 1.2×10^6(9.0×10^3) 120/110(50/60) UVG-250, 10"ANSI C15R 36
CRYO-U12H 4,000 6,000 3,300 9,500 10^-7(10^-9) 2.0×10^3(15) 4.1×10^2(3.1) 2.1×10^8(1.6×10^6) 9.8×10^5(7.4×10^3) 85/75(50/60) UVG-300, 10"ANSI C30VR 40
CRYO-U12HL 4,000 6,800 3,300 9,500 10^-7(10^-9) 2.0×10^3(15.0) 4.1×10^2(3.1) 3.1×10^8(2.3×10^6) 9.8×10^5(7.4×10^3) 90/80(50/60) UVG-300, 10"ANSI C30VR 40
CRYO-U12HSP 4,100 6,000 3,400 9,500 10^-7(10^-9) 2.0×10^3(15.0) 4.1×10^2(3.1) 4.4×10^8(3.3×10^6) 1.6×10^6(1.2×10^4) 90/80(50/60) UVG-300, 10"ANSI C30VR 42
CRYO-U16 5,000 10,000 4,200 16,000 10^-7(10^-9) 1.4×10^3(11.0) 4.1×10^2(3.1) 4.3×10^8(3.3×10^6) 2.4×10^6(1.8×10^4) 110/100(50/60) UVG-400 C30VR 61
CRYO-U16P 5,000 10,000 4,200 16,000 10^-7(10^-9) 1.6×10^3(12) 4.5×10^2(3.4) 4.3×10^8(3.3×10^6) 2.4×10^6(1.8×10^4) 120/110(50/60) UVG-400 C30VR 61
CRYO-U20P 10,000 18,000 8,400 29,000 10^-7(10^-9) 1.1×103(8.7) 5.0×102(3.7) 5.8×10^8(4.4×10^6) 4.6×10^6(3.4×10^4) 180/160(50/60) UVG-500 C30VR 69
CRYO-U20H 10,000 18,000 8,400 29,000 10^-7(10^-9) 1.7×10^3(12.8) 5.0×10^2(3.7) 5.8×10^8(4.4×10^6) 4.6×10^6(3.4×10^4) 160/140(50/60) UVG-500 , ISO-500, 20"ANS C30PVRT 72
CRYO-U22H 17,000 25,000 14,000 39,000 10^-7(10^-9) 4.1×10^3(31) 1.3×10^3(9.6) 8.1×10^8(6.1×10^6) 8.5×10^6(6.4×10^4) 150/135(50/60) UVG-550 C30VR×2 125
CRYO-U22P 11,500 14,000 9,700 39,000 10^-7(10^-9) 1.7×10^3(12.8) 5.0×10^2(3.7) 5.8×10^8(4.4×10^6) 6.0×10^6(4.5×10^4) 180/170(50/60) UVG-550 C30PVRT 115
CRYO-U22WB 13,000 16,500 11,000 39,000 10^-7(10^-9) 3.5×10^3(26) 1.3×10^3(9.6) 8.1×10^8(6.1×10^6) 8.5×10^6(6.4×10^4) 165/150(50/60) UVG-550 C30PMVRT 125
CRYO-U30H 28,000 43,000 23,000 70,000 10^-7(10^-9) 2.7×10^3(20) 7.4×10^2(5.6) 7.8×10^8(5.9×10^6) 1.5×107(1.1×10^5) 240/200(50/60) VG-750 C30VR×2 175

Compressor-CP

비교
구분 전원 전력(KW)(50/60Hz) 냉각방식 냉각수 유량(L/min(20℃) 무게(kg) ADSORBER 교환주기
50Hz 60Hz
C15R 200x3x50, 220x3x60 3.3 4.1 3.5 100 30,000 hours
C30MVER 200x3x50, 220x3x60 4.3 5.2 5~15 131 30,000 hours
C30PVRT 200x3x50, 220x3x60 5.7 7.5 5.5 121 24,000 hours
C30PMVRT 200x3x50, 220x3x60 5.2 6.5 5.5 121 24,000 hours
C40R 200x3x50, 220x3x60 6.5 8 5.5 130 24,000 hours
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